Electrical Characterization of Silicon-on-insulator Materials and Devices; Author: Cristoloveanu, Sorin (Polytechnic Institute Of Grenoble, Fra; Author: Li Sheng S. (Department Of Electrical Engineering, Universit; Hardback; Book

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Electrical Characterization of Silicon-on-insulator Materials and Devices

Author: Cristoloveanu, Sorin (Polytechnic Institute Of Grenoble, Fra; Author: Li Sheng S. (Department Of Electrical Engineering, Universit
Hardback; Book; Index
400 pages
Published: June 1995
Kluwer Academic Publishers Group
ISBN: 0792395484

This text describes a variety of electrical characterization methods, from wafer screening and defect identification to device evaluation. Each technique comes with technical information - experimental set-up, basic models, parameter extraction - that should be useful to the reader.

PRODUCT CODE: 0792395484

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